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MAGNETIC THIN FILM LAMINATED STRUCTURE DEPOSITION METHOD, MAGNETIC THIN FILM LAMINATED STRUCTURE AND MICRO-INDUCTANCE DEVICE
MAGNETIC THIN FILM LAMINATED STRUCTURE DEPOSITION METHOD, MAGNETIC THIN FILM LAMINATED STRUCTURE AND MICRO-INDUCTANCE DEVICE
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机译:磁性薄膜叠层结构的沉积方法,磁性薄膜叠层结构和微感应装置
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摘要
A deposition method includes depositing an adhesive layer on a workpiece to be processed and depositing a magnetic/isolated unit, where the magnetic/isolation unit includes at least one pair of a magnetic film layer and an isolation layer that are alternately disposed. The deposition method of the magnetic thin film laminated structure, the magnetic thin film laminated structure and the micro-inductive device provided by the disclosure can increase a total thickness of the magnetic thin film laminated structure, thereby broadening the application frequency range of the inductive device fabricated thereby.
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