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Application of stress conditions for homogenization of stress samples in semiconductor product acceleration studies

机译:应力条件在应力样本均质化中的应用在半导体产品加速研究中

摘要

A method for applying stress conditions to integrated circuit device samples during accelerated stress testing may include partitioning each of the integrated circuit device samples into a first region having a first functional element, partitioning each of the integrated circuit device samples into at least one second region having at least one second functional element, applying a first stress condition to the first region having the first element, applying a second stress condition to the at least one second region having the at least one second element, determining a first portion of the integrated circuit device samples that functionally failed based on the first stress condition, and determining a second portion of the integrated circuit device samples that functionally failed based on the second stress condition. An acceleration model parameter is derived based on the determining of the first and second portion of the integrated circuit samples that functionally failed.
机译:一种在加速应力测试期间向集成电路器件样品施加应力条件的方法,可以包括将每个集成电路器件样品划分为具有第一功能元件的第一区域,将每个集成电路器件样品划分为至少一个具有第一功能元件的第二区域。至少一个第二功能元件,向具有第一元件的第一区域施加第一应力条件,向具有至少一个第二元件的至少一个第二区域施加第二应力条件,确定集成电路器件的第一部分根据第一应力条件对在功能上失败的样本进行采样,并基于第二应力条件来确定在集成电路装置上采样的第二部分。基于对功能故障的集成电路样本的第一和第二部分的确定,得出加速度模型参数。

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