首页>
外国专利>
ION BEAM IRRADIATION DEVICE AND ION BEAM IRRADIATION METHOD
ION BEAM IRRADIATION DEVICE AND ION BEAM IRRADIATION METHOD
展开▼
机译:离子束辐照装置和离子束辐照方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
An ion beam irradiation device is provided and including: a substrate holder that holds a substrate; a rotating mechanism that rotates the substrate holder about a center portion of the substrate being held; a reciprocating mechanism that reciprocates the substrate holder and the rotating mechanism in the moving direction; an ion beam irradiator that irradiates the substrate with an ion beam; and a control device that controls the rotating mechanism and the reciprocating mechanism. The ion beam has a center region where the beam current density is a predetermined value or more in the moving direction, and a peripheral region where the beam current density is less than the predetermined value, a center region size in the direction orthogonal to the moving direction is larger than a substrate size in the direction orthogonal to the moving direction.
展开▼