CHIP SENSOR DISPOSED WITH A MEASURING AIR CHAMBER, METHOD FOR MEASURING THE CONCENTRATION OF AT LEAST ONE GAS COMPONENT AND CHIP MEASURING AIR CONSTITUENTS WITHIN A MEASURING AIR CHAMBER

摘要

sensor chip arranged within a metering tube for the analysis of a gas, A method for measuring the concentration of at least one component of a gas and air constituent metering chip disposed within a metering chamber a gas sensor chip (1030) has cells (200) for emission and reception. ultrasound, and is configured for a sufficiently large frequency range and for measuring the concentration of at least one of the gas components based on at least two responses within a range. The frequency range can be achieved by varying the size of the cell membranes (230), which vary the polarization voltages, and / or vary the air pressure for a set (205) of cmuts or mems microphones. The sensor chip can be applied, for example, to capnography. the measuring tube (515) is implemented in the airway (400), and it and / or the airway may be designed to reduce turbulence in the exhaled air (12 °) subjected to ultrasound interrogation. chip 1030 can be implemented as self-sufficient in parameter monitoring, avoiding the need for off-chip sensors.