首页> 外国专利> DETERMINING TEMPERATURE DEPENDENCE OF COMPLEX REFRACTIVE INDICES OF LAYER MATERIALS DURING FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS.

DETERMINING TEMPERATURE DEPENDENCE OF COMPLEX REFRACTIVE INDICES OF LAYER MATERIALS DURING FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS.

机译:在制造集成计算元素期间确定层材料的复合折射率的温度相关性。

摘要

A design of an integrated computational element (ICE) includes specification of a substrate and a plurality of layers, their respective constitutive materials, target thicknesses and refractive indices, where refractive indices of respective materials of adjacent layers are different from each other, and a notional ICE fabricated in accordance with the ICE design is related to a characteristic of a sample. One or more layers of the plurality of layers of an ICE are formed based on the ICE design, such that the formed layer(s) includes(e) corresponding material(s) from among the specified constitutive materials of the ICE. Characteristics of probe-light interacted with the formed layer(s) are measured at two or more temperatures. Temperature dependence(ies) of one or more refractive indices of the corresponding material(s) of the formed layers is(are) determined using the measured characteristics. The received ICE design is updated based on the determined temperature dependence(ies) of the refractive index(ices).
机译:集成计算元件(ICE)的设计包括基板和多层的规格,它们各自的构成材料,目标厚度和折射率(其中相邻层的各自材料的折射率彼此不同)以及概念性根据ICE设计制造的ICE与样品的特性有关。基于ICE设计,形成ICE的多个层中的一层或多层,使得形成的层包括ICE的指定构成材料中的相应材料。在两个或多个温度下测量与形成的层相互作用的探测光的特性。使用所测量的特性确定所形成的层的相应材料的一种或多种折射率的温度依赖性。基于所确定的折射率(冰)的温度依赖性来更新所接收的ICE设计。

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