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DETERMINING TEMPERATURE DEPENDENCE OF COMPLEX REFRACTIVE INDICES OF LAYER MATERIALS DURING FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS.
DETERMINING TEMPERATURE DEPENDENCE OF COMPLEX REFRACTIVE INDICES OF LAYER MATERIALS DURING FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS.
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机译:在制造集成计算元素期间确定层材料的复合折射率的温度相关性。
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摘要
A design of an integrated computational element (ICE) includes specification of a substrate and a plurality of layers, their respective constitutive materials, target thicknesses and refractive indices, where refractive indices of respective materials of adjacent layers are different from each other, and a notional ICE fabricated in accordance with the ICE design is related to a characteristic of a sample. One or more layers of the plurality of layers of an ICE are formed based on the ICE design, such that the formed layer(s) includes(e) corresponding material(s) from among the specified constitutive materials of the ICE. Characteristics of probe-light interacted with the formed layer(s) are measured at two or more temperatures. Temperature dependence(ies) of one or more refractive indices of the corresponding material(s) of the formed layers is(are) determined using the measured characteristics. The received ICE design is updated based on the determined temperature dependence(ies) of the refractive index(ices).
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