CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, CLEANING DEVICE MAINTENANCE METHOD, AND COMPUTER-READABLE RECORDING MEDIUM INCLUDING CLEANING DEVICE MAINTENANCE PROGRAM

摘要

A cleaning device is disclosed. According to an embodiment, the cleaning device is provided with a cleaning member, a moving unit, a measurement unit, and a control unit. The control unit, before cleaning, causes the cleaning member to be pressed onto a reference member and, after a measured value from the measurement unit has reached a predetermined resetting load, causes the cleaning member to be moved in a direction away from the reference member. At the point in time when measured values from the measurement unit became equal at least twice successively per unit amount of movement of the cleaning member, the control unit performs a reset operation in which the position of the cleaning member at the point in time is set as the reference position of the cleaning member during cleaning, and in which the measured value from the measurement unit at the point in time is set as a pressing reference value during cleaning.