HIGH SPEED GRAPHENE OXIDE BOLOMETERS AND METHODS FOR MANUFACTURING THE SAME

摘要

Bolometers and methods of forming the same are provided. A bolometer that includes a substrate, a support structure comprising at least one SiGe layer and at least one Si layer, an absorber comprising reduced graphene oxide, and a thermistor comprising partially reduced graphene oxide are described. Also described are methods for forming bolometers and the parts contained therein.