OPTIMIZATION METHOD AND DEVICE FOR SYSTEM PARAMETER DESIGN SPACE

摘要

The present invention discloses an optimization method and device for a system parameter design space. The optimization method comprises: acquiring process parameter data, the process parameters comprising quality parameters of an intermediate product of a previous working section; selecting a type of critical quality attributes according to a working section production condition; screening out process parameters related to the critical quality attributes as critical process parameters; establishing a relation model between the critical process parameters and the critical quality attributes; and acquiring a design space according to the relation model, the design space being a specific range corresponding to the critical quality attributes. The present invention achieves system parameter design space optimization by screening out critical process parameters related to critical quality attributes and establishing a relation model therebetween, and thus provides an effective and reliable solution for parameter release.