ALTERNATING ELECTRIC FIELD-BASED ABSOLUTE TIME-GRATING ANGULAR DISPLACEMENT SENSOR

摘要

An alternating electric field-based absolute time-grating angular displacement sensor, comprising a rotor base body (2) and a stator base body (1), the lower surface of the rotor base body (2) is provided with a reflective electrode I (2-2), a sensing electrode (2-1) and a reflective electrode II (2-3), the reflective electrodes I, II (2-2, 2-3) are respectively connected to the sensing electrode (2-1); the upper surface of the stator base body (1) is provided with a reception electrode I (1-2), an excitation electrode (1-1) and a reception electrode II (1-3), four excitation phases of the excitation electrode (1-1) are respectively connected with four excitation signals, the reception electrode I (1-2) outputs a first fine sinusoidal traveling wave signal, the reception electrode II (1-3) outputs a second fine sinusoidal traveling wave signal, the phase difference between the first fine sinusoidal traveling wave signal and the second fine sinusoidal traveling wave signal is used to calculate a rough counter electrode position value, the first fine sinusoidal traveling wave signal or the second fine sinusoidal traveling wave signal is used to calculate a fine angular displacement value, and the fine angular displacement value and the rough counter electrode position value are combined to obtain an absolute angular displacement value. Said sensor enables absolute angular displacement measurement while expanding the range of applications and enhancing industrial adaptability.