METHOD AND APPARATUS FOR RECOVERING FLUORINE-BASED SOLVENT, AND METHOD AND SYSTEM FOR CLEANING OBJECT TO BE CLEANED

摘要

The present invention provides a method for recovering a fluorine-based solvent from a used cleaning solvent composition with high purity and high recovery rate. A method for recovering a fluorine-based solvent according to the present invention is configured to recover a fluorine-based solvent from a used cleaning solvent composition that contains a dirt component and the fluorine-based solvent; and this method for recovering a fluorine-based solvent comprises a step (A) for obtaining a water mixture by adding water to the used cleaning solvent composition, a step (B) for obtaining a liquid distillate that contains water and the fluorine-based solvent as main components by means of distillation of the water mixture, and a step (C) for removing water from the liquid distillate.