A sample support structure for electron microscopy includes a membrane having a film, pillars distributed on the film, and a frame supporting the membrane. The pillars may be distributed across an imaging area of the membrane within a periphery defined by the frame. The pillars are distributed on the top side of the membrane and the frame supports the membrane from the bottom side of the membrane. The film may be uniformly thick and planar between the pillars. The film and pillars may be constructed of silicon nitride. The pillars may be uniformly spaced from each other. The pillars may have a uniform first width with respect to a first axis in a plane of the film. The pillars may have a uniform second width with respect to a second axis in the plane of the film. The pillars may have all the same height over the film.
展开▼