MGAL2O4 SINTERED BODY, SPUTTERING TARGET USING SINTERED BODY, AND METHOD FOR PRODUCING MGAL2O4 SINTERED BODY

摘要

An MgAl₂O₄ sintered body characterized by exhibiting a relative density of 90% or higher, and exhibiting an L* value of 90% or higher in the L*a*b* color system. A method for producing an MgAl₂O₄ sintered body which is characterized by hot-pressing an MgAl₂O₄ powder at 1,150-1,300°C, and thereafter, sintering at 1,350°C or higher in an air atmosphere. The present invention addresses the problem of providing an MgAl₂O₄ sintered body which is white in color and has a high density, a sputtering target which uses the sintered body, and a method for producing the MgAl₂O₄ sintered body.