NUMERICALLY CONTROLLED ROTARY PROBE SWITCHING DEVICE BASED ON ENVIRONMENTALLY CONTROLLABLE ATOMIC FORCE MICROSCOPE

摘要

Provided is a numerically controlled rotary probe switching device based on an environmentally controllable atomic force microscope. The device comprises an upper cavity cover (1) and a probe switching structure, with the upper cavity cover (1) being provided with an irregular rectangular-like boss (1.1), an inner recess (1.8), a rectangular light window structure and a sealing flange structure. The device has the following advantages: 1) the design of the irregular rectangular-like boss (1.1), the inner recess (1.8), the rectangular light window structure and the sealing flange structure obviously increases the operation space inside a cavity, and effectively improves the space utilization rate; 2) the design of the inner recess (1.8), a connecting structure, i.e. an L-shaped transition plate (10.1), and the asymmetrical cooperation between a probe bracket (10) and a probe carrying block (9) effectively ensure the vertical focusing height and the focusing position of a laser; and 3) the efficient and accurate switching of up to 8 probes (12) with different functions can be realized by means of program control in different operation environments, such as in a vacuum, at an atmosphere and in a liquid, so that the functions, such as surface topography scanning, Raman spectrum analysis, microscopic friction and abrasion and friction coefficient measurement, are realized in situ in the same operation environment.