METHODOLOGY AND INSTRUMENTATION FOR THIN FILM MECHANICAL ANALYSIS

摘要

The invention provides for a material characterization system, method, and instrumentation for measuring the mechanical properties of nano-scale thin films. The thin film mechanical characterization system, method, and instrumentation of the present invention for ultra-thin films includes a motor and load cell. The instrumentation device includes a bath that can be filled or used with liquid so that a thin film can float via the surface tension and can be stretched until permanent deformation occurs, while recording the amount of force applied by the motor and other parameters. Further, the invention provides a process that transfers the nano- scale thin film to the tensile testing instrument and a process to obtain the physical mechanical properties of thin films that are at the nanoscale level.