Fault classification system and method based on electrical design intent

摘要

A method for automatically classifying one or more defects based on electrical design characteristics includes receiving one or more images of a selected region of a sample, receiving one or more sets of design data associated with selected regions of the sample, Comparing one or more images to one or more design data sets to locate one or more defects in one or more images of a selected region of the sample, retrieving one or more patterns of interest from one or more design data sets corresponding to the one or more defects, And classifying one or more defects in one or more images of the selected region of the sample based on the one or more annotated electrical design characteristics included in the one or more patterns of interest.