PLATING APPARATUS PLATING METHOD STOCKER AND METHOD OF CONVERTING ATTITUDE OF SUBSTRATE HOLDER

摘要

The present plating apparatus ensures that the substrate holder is easily serviced while ensuring easy access to the substrate holder and while the substrate is being processed in the plating apparatus. The plating apparatus includes a plating section for plating a substrate, a substrate holder for holding the substrate, a substrate holder transfer section for holding and transferring the substrate holder, a stocker for storing the substrate holder, And a stocker setting unit for storing the stocker. The stocker includes a moving mechanism for moving the stocker into the stocker setting unit or moving the stocker from the stocker setting unit.