MODIFIED POLYSILAZANE FILM AND METHOD FOR PRODUCING GAS BARRIER FILM

摘要

A suitable modified polysilazane film as an intermediate material for forming a predetermined gas barrier film and a method for producing a gas barrier film having excellent gas barrier properties using such a modified polysilazane film as an intermediate material to provide. A modified polysilazane film formed by forming a modified polysilazane layer on a substrate and a method for producing a gas barrier film made of such an intermediate material, wherein the thickness of the modified polysilazane layer is set to a value within a range of 10 to 500 nm, Further, the refractive index of the modified polysilazane layer is set to a value within a range of 1.48 to 1.63.