APPARATUS FOR BORON NITRIDE NANOTUBES AND METHOD OF MANUFACTURING BORON NITRIDE NANOTUBES USING THE SAME

摘要

A plasma torch vertically connected to the top of the reaction chamber, the plasma torch generating plasma; A central gas inlet connected to the top of the plasma torch for vertically supplying a central gas containing helium gas; A raw material supply unit connected to an upper portion of the plasma torch and formed adjacent to the central gas inlet, for injecting hexagonal boron nitride (h-BN) powder; A reaction gas inlet connected to the upper portion of the plasma torch and formed adjacent to the central gas inlet and supplying a reaction gas to the plasma torch; A refractory liner formed on a side of the reaction chamber and controlling a temperature gradient; And a cooling gas inlet connected to the lower portion of the reaction chamber and injecting a cooling gas in a direction opposite to the center gas, wherein the hexavalent boron nitride powder is vaporized through the plasma generated in the plasma torch to form boron vapor, A nitrogen precursor is formed from the reaction gas, and a boron vapor, a nitrogen precursor, and a hexavalent boron nitride powder are transported into the reaction chamber, and the boron nitride nanotubes are reacted in the reaction chamber, And growing vertically down to the reaction chamber. The apparatus for manufacturing a boron nitride nanotube is provided.