Alignment Method for Off-axis Reflective Optical System

摘要

The present invention relates to a primary and secondary alignment system and method for non-axis reflective optical systems for achieving maximum optical performance of a non-axis reflective optical system and systematically aligning a mirror, comprising a parallel light source (interferometer light source, Distance object light source); A plane mirror aligned with an optical axis of the parallel light source; A main mirror for receiving and reflecting the parallel light source; A reference surface formed on the edge side of the main mirror and machined perpendicular to the z axis; A sub-diameter receiving the light incident from the main mirror aligned by the reference plane; And an imaging element (included in an interferometer) for imaging the interference fringe by receiving the light reflected from the sub-mirror. The main mirror of the non-axial reflecting optical system for achieving the optical performance of the non- It is possible to minimize the amount of light and minimize the distortion of the point spread function (PSF).