OZONE PLENUM AS UV SHUTTER OR TUNABLE UV FILTER FOR CLEANING SEMICONDUCTOR SUBSTRATES

摘要

A quartz window with an internal plenum is operable as a shutter or UV filter in the degassing chamber by supplying an ozone containing gas to the plenum. The pressure in the plenum can be adjusted to block UV light transmission into the degassing chamber or to adjust the transmittance of UV light through the window. Once the plenum is evacuated, the plenum allows maximum transmission of UV light into the degassing chamber.