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METHOD FOR CONTROLLING DISTURBANCE OF TRANSFER DEVICE USING ACTIVE VIBRATION CONTROL DEVICE

机译:利用主动振动控制装置控制转移装置扰动的方法

摘要

The present invention relates to an active vibration control device. More specifically, the present invention relates to an active vibration control device and a method for controlling the disturbance of a transfer device by using the active vibration control device, in which cancel force resulting from the driving of an upper stage or a gantry is applied to the disturbance, thereby rapidly removing vibration. According to the present invention, the active vibration control device (1000) includes: a displacement sensor (1580) and a servo-valve (1590). The displacement sensor (1580) is installed at a lower portion of a displacement sensor target (1512) provided on an air spring top plate (1511) of an air spring (1510) of a vibration control mount (1500) interposed between a base (1200) and a lower frame (1300) to sense the distance from the displacement sensor target (1512). In addition, the displacement sensor (1580) senses, in real time, a gap between a bottom surface of the air spring top plate (1511) and the top surface of a clamp ring (1514) assembled with an upper portion of the air spring chamber (1513). The servo valve (1590) receives a signal from the vibration control device controller (1400) based on the value of the displacement sensor to operate in real time such that air is supplied, thereby adjusting the height of the air spring (1510) in real time.;COPYRIGHT KIPO 2019
机译:主动振动控制装置技术领域本发明涉及一种主动振动控制装置。更具体地,本发明涉及主动振动控制装置和通过使用该主动振动控制装置来控制传递装置的扰动的方法,其中,将由上级台架或龙门架的驱动产生的抵消力施加于该主动振动控制装置。扰动,从而迅速消除振动。根据本发明,主动振动控制装置(1000)包括:位移传感器(1580)和伺服阀(1590)。位移传感器(1580)安装在位移传感器靶(1512)的下部,该位移传感器靶(1512)设置在介于振动控制底座(1500)的空气弹簧(1510)的空气弹簧(1510)的空气弹簧顶板(1511)上。 1200)和下部框架(1300)来感应距位移传感器目标(1512)的距离。另外,位移传感器(1580)实时地感测空气弹簧顶板(1511)的底表面和与空气弹簧的上部组装在一起的夹紧环(1514)的顶表面之间的间隙。室(1513)。伺服阀(1590)基于位移传感器的值从振动控制装置控制器(1400)接收信号,以实时地操作以供应空气,从而实时地调节空气弹簧(1510)的高度。时间。; COPYRIGHT KIPO 2019

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