METHOD FOR CONTROLLING DISTURBANCE OF TRANSFER DEVICE USING ACTIVE VIBRATION CONTROL DEVICE

摘要

The present invention relates to an active vibration control device. More specifically, the present invention relates to an active vibration control device and a method for controlling the disturbance of a transfer device by using the active vibration control device, in which cancel force resulting from the driving of an upper stage or a gantry is applied to the disturbance, thereby rapidly removing vibration. According to the present invention, the active vibration control device (1000) includes: a displacement sensor (1580) and a servo-valve (1590). The displacement sensor (1580) is installed at a lower portion of a displacement sensor target (1512) provided on an air spring top plate (1511) of an air spring (1510) of a vibration control mount (1500) interposed between a base (1200) and a lower frame (1300) to sense the distance from the displacement sensor target (1512). In addition, the displacement sensor (1580) senses, in real time, a gap between a bottom surface of the air spring top plate (1511) and the top surface of a clamp ring (1514) assembled with an upper portion of the air spring chamber (1513). The servo valve (1590) receives a signal from the vibration control device controller (1400) based on the value of the displacement sensor to operate in real time such that air is supplied, thereby adjusting the height of the air spring (1510) in real time.;COPYRIGHT KIPO 2019