TREATMENT FOR SEQUENTIAL INFILTRATION SYNTHESIZING METHOD OF INFILTRATIVE MATERIAL, AND STRUCTURE AND APPARATUS FORMED BY USING SAME

摘要

The present invention relates to a sequential infiltration synthesizing method of an infiltrative material, a structure formed by using the same, and a method and apparatus for forming the structure on a substrate. The method for forming the structure on a substrate comprises the steps of: providing a substrate with an infiltrative material from a reaction chamber; and infiltrating the infiltrative material as an infiltration material during one or more infiltration cycles.;COPYRIGHT KIPO 2019