Techniques for forming patterned features using directional ions

摘要

A method of patterning a substrate. The method includes providing a first surface feature and a second surface feature in a staggered configuration in a layer, wherein the layer is disposed on the substrate, and in the presence of a reactive environment comprising a reactive species, Directing first ions from the exposure to a first side of the first surface feature and a first side of the second surface feature, wherein the first exposure comprises a first side of the first surface feature and a first side of the second surface feature And after the step of transmitting, the first surface feature and the second surface feature are merged to form a third surface feature.