Method of depositing a magnetic thin film laminated structure, a magnetic thin film laminated structure and a micro-inductor element

摘要

The present invention provides a method of depositing a magnetic thin film laminated structure, a magnetic thin film laminated structure, and a micro-inductor device. The deposition method includes depositing an adhesive layer (1) on a workpiece (S1); And the magnetic / insulating unit includes a step S2 including at least a pair of alternately arranged magnetic thin film layers (2) and an insulating layer (3). The deposition method, the magnetic thin film lamination structure, and the micro-inductor device of the magnetic thin film laminate structure can increase the total thickness of the magnetic thin film laminate structure and widen the application frequency range of the inductor device obtained therefrom.