Calibration data generation apparatus calibration data generation method and flow rate control device

摘要

The present invention is to provide a calibration data generation apparatus capable of generating calibration data in a non-step manner without reassembling a fluid control valve and a calibration data generation method. The calibration data generation apparatus is provided on a fluid control valve for controlling a fluid and generates calibration data of a position sensor which outputs an output value corresponding to a position of a valve body moving in a contacting/separating direction with respect to a valve seat. The calibration data generation apparatus includes: a flow rate sensor which measures the flow rate of a fluid flowing through the fluid control valve; a differential pressure control mechanism which controls the differential pressure between upstream and downstream sides of the fluid control valve; a temperature control mechanism which controls the temperature of the fluid control valve; and a control unit which, in a state in which the differential pressure control mechanism controls the differential pressure so that the fluid passing through the fluid control valve has sound velocity, uses the temperature control mechanism to change the temperature from a reference temperature to a comparative temperature different from the reference temperature. In addition, the control unit includes: an output value acquisition part which acquires reference output values at the reference temperature, which are respectively outputted from the position sensor and the flow rate sensor; a valve opening control part which controls the valve opening of the fluid control valve so that, in a state in which the temperature control mechanism controls the temperature to the comparative temperature, an output value outputted from one of the position sensor and the flow rate sensor becomes equal to the reference output value of the one; and a calibration data generation part which, after the valve opening control part has controlled the valve opening of the fluid control valve, generates the calibration data on the basis of a calibration data generation output value outputted from the other one of the position sensor and the flow rate sensor.