LED Apparatus of optical power controlling for scan type exposure and method of controlling the power

摘要

The present invention relates to a control apparatus of optical power for LED scan exposure, which uniformly controls the optical power of each LED light source employed in an optical module array, and to a control method thereof. The apparatus comprises: a detection unit including a detection sensor which is spaced apart from the optical module array, is placed on one side of a stage on which a body to be exposed is mounted, matches 1 : 1 with each LED light source mounted on the optical module array, and is installed to be in alignment with the LED light source; and a control unit for receiving optical power data detected by the detection sensor and individually controlling the optical power of each LED light source within a confidence level.