Ion Implantation Systems and Ion Implantation Methods and Conductive Beam Optics in Electrostatic Filters

摘要

An approach is provided herein to increase the surface area of a conductive beam optic by providing grooves or surface features. In one approach, the conductive beam optics may be part of an electrostatic filter having a plurality of conductive beam optics disposed along the ion beam line, the at least one conductive beam optics comprising a plurality of grooves formed in the outer surface. In some approaches, a power supply in communication with the plurality of conductive beam optics may be provided, the power supply configured to supply voltage and current to the plurality of conductive beam optics. The plurality of grooves may be provided in a spiral pattern along the length of the conductive beam optics and / or oriented parallel to the longitudinal axis of the conductive beam optics.