METHOD AND SYSTEM FOR COMPENSATING NONLINEARITY RESPONSE CHARACTERISTICS IN PHASE-SHIFTING DEFLECTOMETRY

摘要

The present invention relates to a system and a method for compensating nonlinearity response characteristics in object shape measurement using phase-shifting deflectometry and, more specifically, to a method for compensating nonlinearity response characteristics in object shape measurement using phase-shifting deflectometry, comprising: a step, by a pattern generating part, for generating a pattern and projecting the same onto a measurement object; a step, by a detector, for obtaining an image of the deformed pattern reflected from the measurement object; a step, by a compensation means, for linearizing the non-linear response on the basis of a look-up table, in which the non-linear response characteristics of the detector and the pattern generating part are considered; and a step, by the compensation means, for compensating the phase shifting amount generated by the nonlinearity response characteristics.;COPYRIGHT KIPO 2019