DBD plasma device with multi-parallel capillaries

摘要

It is an object of the present invention to provide a plasma generator capable of both a direct method of directly discharging a plasma to a sample as required and an indirect method of delivering active species generated by a plasma discharge to a sample. According to the above object, according to the present invention, an electrode is placed in a dielectric capillary, a plurality of such DBD plasma electrode modules are arranged in parallel, a voltage is applied to the electrodes contained in each DBD plasma electrode module, And the plasma discharge is generated between the electrodes in the capillary by alternately connecting both terminals of the AC power source to the arranged electrodes, thereby generating plasma discharge in a certain area as a whole. In addition, the multiple parallel capillary plasma generator is placed in a closed first chamber, a gas inlet (including an intake valve) and a gas outlet (including an exhaust valve) are provided in the first chamber, And connecting the gas outlet of the first chamber to the second chamber and the gas connection to allow the sample to be treated with the active species produced by the plasma discharge.