Calibration method and apparatus for broadband achromatic aberration composite wave plate and corresponding measuring system

摘要

The present invention discloses a calibration method and apparatus for composite wave plates 2 and 3 and corresponding measurement systems. The calibration method comprises the steps of: A. determining a first matrix comprising at least one unknown, specifying the composite wave plate (2, 3); B. determining, based on the first matrix, a relationship between the theoretical light intensity and the alignment angle deviation value of the composite wave plate (2, 3); C. The composite wavelength plate (by adjusting according to the relationship between the theoretical light intensity already determined in step (B) and the alignment angle deviation value of the composite wavelength plate 2, 3 and the light intensity data obtained by the actual measurement) Obtaining a second matrix capable of specifying 2, 3) and not including an unknown. According to the technical scheme of the present invention, when performing calibration on the composite waveplates 2 and 3 or the measurement system, the number of unknowns can be greatly reduced, thus reducing the difficulty of calibration and improving the accuracy of calibration. .