ACTIVE VIBRATION CONTROL APPARATUS AND DISTURBANCE CONTROL METHOD OF CONVEYER USING THE SAME

摘要

The present invention relates to an active vibration suppression apparatus, and more particularly, to a disturbance control method of a conveyance apparatus using an active vibration suppression apparatus capable of quickly removing vibration by applying a cancellation force to disturbance caused by driving of an upper stage or a gantry. A disturbance control method of a conveyance apparatus using the active vibration suppression apparatus according to the present invention is characterized in that a vibration suppression apparatus controller of an active vibration suppression apparatus including a vibration suppression mount, a displacement sensor and a servo valve detects a clearance between the upper surface of the clamp ring A step of initializing the value of each of the displacement sensors at the landing position to zero, receiving the position and acceleration information of the linear stage from the motion controller of the linear stage moving on the upper portion of the base provided on the vibration-damping mount, Measuring an acceleration of the base with an upper vibration sensor provided on the upper plate side of the air spring and an acceleration of the ground with a floor vibration sensor provided below the air spring, Based on the position information of the linear stage, the center-of-gravity disturbance per 6 axes and the ground acceleration Estimating a disturbance of floor vibration transmission per three axes (X, Y, Z) from the signal, calculating a cancellation force for the predicted disturbance, calculating a position error signal for the target position of the base, Calculating a rotational inertia moment from the position of the linear stage, and updating the position feedback control parameter and the vibration feedback control parameter in proportion to the calculated rotational moment of inertia, respectively; Calculating a control force for the position and acceleration error of each of the six axes, and calculating a control force for the VCM inverse kinematic matrix, which is a distributor, after adding the control force for the repulsive force disturbance canceling force, the bottom vibration disturbance canceling force and the acceleration error, And the sum of the disturbance cancellation force and the position error control force is added to each servo valve through an inverse kinematic matrix which is a distributor of the servo valve. Times and the step of, characterized in that it comprises the step of waiting for a certain sampling time to match the operating cycle.