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- GROUP III-V SUBSTRATE MATERIAL WITH PARTICULAR CRYSTALLOGRAPHIC FEATURES AND METHODS OF MAKING
- GROUP III-V SUBSTRATE MATERIAL WITH PARTICULAR CRYSTALLOGRAPHIC FEATURES AND METHODS OF MAKING
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机译:-具有特定晶体学特征的III-V组基质材料及其制造方法
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摘要
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摘要
The present invention relates to a substrate, comprising a body comprising a III-V material and having an upper surface, the body including a defined off-cut angle (?) Between the upper surface and the crystallographic reference surface, Deg.] Or less off-cut angular transformation (2 [beta]).
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