A manufacturing apparatus having an oxygen-free atmosphere inside which heat treatment dissolution and chemical reaction are possible

摘要

The present invention relates to a heat treatment, a dissolution, or a chemical reaction apparatus with an oxygen-free atmosphere therein and, more specifically, to a manufacturing apparatus with an oxygen-free atmosphere therein capable of heat treatment, dissolution and chemical reaction which includes two vacuum chambers, performs work of removing oxygen in one vacuum chamber, performs a heat treatment, a dissolution, or a chemical reaction process in the remaining chamber, mounts a metal for oxygen removal in one among the vacuum chambers to remove the oxygen, and dissolves the metal by an arc generation device to create metal oxide to minimize an oxygen concentration in a plurality of vacuum chambers.