Heater plate, manufacturing apparatus of heat flux sensor using this heater plate, manufacturing method of this heater plate, and manufacturing apparatus of this heater plate

摘要

The heater plate 20 is provided on the sheet-like heat generating member 200 that generates heat when energized, and on one main surface 201 side of the sheet-like heat generating member 200 to protect the sheet-like heat generating member 200. (23), the output circuit portion 25 provided on the surface 231 on the side opposite to the sheet-like heat generating member 200 of the protective film, and the protrusion forming film provided between the protective film 23 and the sheet-like heat generating member 200 ( 261). The output circuit section 25 has a protrusion 251 formed to be in contact with the terminal of the heat flux sensor to be inspected. The protrusion forming film 26 has a protrusion 261 at a position corresponding to the protrusion 251. The sheet-like heat generating member 200, the protective film 23, the output circuit portion 25, and the protrusion forming film 26 are integrally formed.