Block for centering semiconductor wafers on a vacuum stage in a photolithography cluster line before carrying out technological operations

摘要

The utility model relates to devices specifically designed for positioning, orienting and centering semiconductor wafers, and can be used in semiconductor manufacturing in the manufacture of ICs, LSIs and VLSIs in the photolithography cluster line before carrying out technological operations, in particular, before centrifugation. Essence: the unit includes two centering pushers with horizontal movement mechanisms, placed diametrically opposite on a common platform with a vertical movement drive, which are made in the form of strips with a stepped segmented ring groove facing the vacuum table, while the groove recesses are made of at least along two circles, the diameters of which correspond to the diameters of the plates being machined, and the axes of the grooves coincide with the center of the vacuum table during the centering process Nia plates. The technical result is to reduce the downtime of equipment for replacement in a centrifuge of a vacuum table when changing the diameter of the processed plates. 7 ill.