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HIGH-SENSITIVE IONIZATION VACUUM-GAUGE TRANSDUCER

机译:高灵敏度电离真空计传感器

摘要

FIELD: measuring equipment.;SUBSTANCE: invention relates to a technique for measuring high vacuum. Highly sensitive ionization vacuum transducer contains a concentrically located pin anode, hollow cylindrical cold cathode, at the same time being a permanent magnet magnetized in the axial direction, and conical pole plates, forming a transverse electric magnetic field in the active zone of the transducer, centering plate, to which the electrode system of the transducer is attached, with additional ceramic reflectors in the form of discs placed at the ends of the anode axis introduced into the transducer, which enhance ionization processes, which increases the sensitivity and accuracy of the transducer.; EFFECT: improved sensitivity and accuracy of the transducer. ;1 cl, 5 dwg
机译:技术领域本发明涉及一种用于测量高真空的技术。高灵敏度电离真空换能器包含同心定位的针形阳极,空心圆柱形冷阴极(同时在轴向方向上被磁化的永磁体)和圆锥形极板,在换能器的有效区域中形成横向电场,定心板(传感器的电极系统已连接到该定心板)上,另外的陶瓷反射器以圆盘的形式放置在引入传感器的阳极轴的末端,从而增强了电离过程,从而提高了传感器的灵敏度和准确性。; 效果:提高了传感器的灵敏度和准确性。 ; 1 cl,5 dwg

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