METHOD OF MAKING CERAMIC PIEZOELECTRIC MATERIALS FROM NANO- OR ULTRAFINE POWDERS OF PHASES OF OXYGEN-OCTAHEDRAL TYPE

摘要

FIELD: manufacturing technology.;SUBSTANCE: invention relates to ceramic piezoelectric, dielectric, ferromagnetic and mixed materials based on phases of oxygen-octahedral type (for example, with a perovskite-type structure) used in semiconductor, piezoelectric and radioelectronic engineering, in particular, for production of hydroacoustic devices, microwave devices, ultrasonic ranges, as well as devices for accurate positioning of objects (lithography, tunnel raster microscopes), etc. Nano- and/or ultradispersed oxygen-octahedral powder is mixed with powder of ammonium salt of one of polybasic organic acids in ratio of 3:1–3:7, mixture is pressed and heated in air to temperature of 400–420 °C, with average speed of not more than 2 °C/min. Formed porous agglomerates are milled; press-molds are formed from the formed powder and heated to 1,050–1,150 °C with speed not lower than 60 °C/min, and then at a rate of not less than 10 °C/min is cooled down to 900–940 °C and maintained at this temperature for not less than 70–80 minutes.;EFFECT: reduced duration of sintering process, reduced dielectric losses while maintaining values of electromechanical coupling coefficients, dielectric permeability and piezoelectric modulus of piezoelectric materials.;5 cl, 2 tbl, 14 ex