High-purity quartz glass with a low absolute refractive index

摘要

Quartz glass articles, with the quartz glass article is a combined concentration of hydroxyl groups and containing protium deuteroxylgruppen of less than 10 ppm, of the quartz glass article an absolute refractive index of less than or equal to 1,560820 at a wavelength of 193,368 nm, wherein the quartz article is a fictive temperature t_f of less than 1050°C, and wherein the quartz article is a total concentration of halogens of less than 10 ppm, based on the weight.