drehratensensor with a substrate, manufacturing method for a drehratensensor

摘要

it is a drehratensensor (1) with a substrate usewith the drehratensensor and at least a first kompensationsstruktur (10) and at least one second kompensationsstruktur (20) includeswith the first kompensationsstruktur (10) by application of a voltage to quadraturkompensation in a first direction and second kompensationsstruktur (20) by creating a further spannung in a second direction to quadraturkompensation trained, characterizedthe first kompensationsstruktur (10) and the second kompensationsstruktur (20) at least teileweise together adjacent a kompensationsstrukturenpaar (30) training.