System for electrically decoupled, homogeneous temperature control of an electrode by means of heat pipes and processing plant with such a system

摘要

The invention relates to a system for temperature control of an electrode. The system has at least one heat pipe, a coupling element and a tempering device. In this case, the heat pipe is suitable to be arranged at least partially and with at least one first end in the electrode. The coupling element is suitable for heating or cooling a second end of the heat conducting tube, while the tempering device is suitable for heating or cooling the coupling element. The electrode and the temperature control are galvanically separated from each other. The invention further relates to a treatment plant having a treatment chamber and at least one electrode within the treatment chamber and at least one such system for tempering an electrode.