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Method and apparatus for generating a two-dimensional interferogram with a Michelson-type free-jet design

机译:用迈克尔逊型自由喷射设计产生二维干涉图的方法和装置

摘要

The invention relates to a method for producing a two-dimensional interferogram with a Michelson-type free-jet interferometer comprising an extended, spatially partially coherent light source and a two-dimensional light detector, wherein light from the light source is split by a beam splitter having a semitransparent beam splitter mirror into a sample light beam and a reference light beam and a sample arm and a reference arm, the specimen light beam recurring from a sample being directed onto the light detector via the beam splitter mirror, the reference light beam exiting the reference arm subtending a predetermined angle greater than zero with the sample light beam on the light detector, the length of the specimen Referenzarms is variable, characterized in that the reference light beam by means of an odd number of reflections in each reflection plane in at least one Referenzarmabschnitt is laterally offset to the side and opposite parallel running through a fixed at the output of the reference arm arranged, deflected by diffraction or refraction light deflecting element.
机译:用迈克尔逊自由射影干涉仪产生二维干涉图的方法技术领域本发明涉及一种使用迈克尔逊型自由射束干涉仪产生二维干涉图的方法,该干涉仪包括扩展的,空间部分相干的光源和二维光检测器,其中来自光源的光被光束分开。具有半透明的分束镜的分束器,其分为样品光束和参考光束以及样品臂和参考臂,从样品产生的样品光束通过分束镜被引导到光检测器上,该参考光束离开参考臂并与光检测器上的样品光束以大于零的预定角度对向时,样品样品的长度是可变的,其特征在于,参考光束通过在每个反射平面中的奇数次反射而入射。至少一个Referenzarmabschnitt从侧面横向偏移,并反向平行穿过固定在输出端的基准臂布置成由衍射或折射光偏转元件偏转。

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