Matrix substrate for digital x-ray detector, digital x-ray detector equipped therewith and method for its production

摘要

A matrix substrate for a digital X-ray detector may include: a base substrate; a thin film transistor disposed over the base substrate; a PIN diode including a lower electrode connected to the thin film transistor, a first PIN layer disposed on the lower electrode, and an upper electrode disposed on the first PIN layer; a second PIN layer spaced from the PIN diode, the second PIN layer disposed over the thin film transistor; and a bias electrode electrically connected to the upper electrode.