Method and apparatus for operating a tunable optical resonator and optical resonator

摘要

The invention relates to a method for operating a tunable optical resonator (100), wherein the optical resonator (100) comprises a first mirror element (102), a second mirror element (104) movably arranged at a mirror distance from the first mirror element (102) the first mirror element (102) associated first electrode (106) and a second mirror element (104) associated with the second electrode (112). The second electrode (112) is arranged opposite the first electrode (106) so that the second mirror element (104) can be deflected by applying an alternating potential to the first electrode (106). In the method, first, a drive change potential for changing the mirror distance is superimposed with a detection change potential for detecting the mirror distance to obtain the change potential. An electrode potential applied to the second electrode (112) is tapped off. Finally, using the alternating potential and the electrode potential, a distance signal representing the mirror distance is generated.