Vibration damper and method of designing a vibration damper and method of selecting a vibration damper

摘要

The invention relates to a vibration damper (30,70) with a holder (31,54,71), a damping element (34,50,74) and a mass (35), wherein the damping element (34,50,74) the holder ( 31,54,71) and the mass (35) interconnects. The vibration damper (30,70) is designed so that the vibration damper (30,70) causes an approximately equal attenuation in all spatial directions.The invention further relates to a projection exposure apparatus (1) for semiconductor technology with a vibration damper according to the invention (30,70) The invention further relates to a method for designing a vibration absorber according to the invention (30, 70) comprising the following method steps: a) Determining the damping properties of the damping element (34, 50, 74), b) Determining the natural frequencies of the vibration absorber (34, 50, 74) in all spatial directions, c) adaptation of the damping element (34,50,74) and / or the mass (35,75), d) repetition of the process steps b) and c) to the properties of the vibration absorber (30,70) in the The invention furthermore comprises a method for using a vibration absorber (30, 70) according to the invention, comprising the following method ens steps: a) selection of the component to be damped (44), b) determination of a suitable position for mounting the vibration absorber (30, 70), c) selection of a vibration absorber (30, 70), d) fitting of the vibration absorber (30, 70) e) determination of the damping of the resonance of the component (44), f) repetition of the method steps c) to e) until an attenuation value in the range of the predetermined tolerances is reached.