首页> 外国专利> METHOD AND APPARATUS FOR DESIGNING MODEL-BASED CONTROL HAVING TEMPORALLY ROBUST STABILITY AND PERFORMANCE FOR MULTIPLE-ARRAY CROSS-DIRECTION (CD) WEB MANUFACTURING OR PROCESSING SYSTEMS OR OTHER SYSTEMS

METHOD AND APPARATUS FOR DESIGNING MODEL-BASED CONTROL HAVING TEMPORALLY ROBUST STABILITY AND PERFORMANCE FOR MULTIPLE-ARRAY CROSS-DIRECTION (CD) WEB MANUFACTURING OR PROCESSING SYSTEMS OR OTHER SYSTEMS

机译:用于设计基于模型的控制的方法和装置,其具有多阵列交叉(CD)Web制造或处理系统或其他系统的临时鲁棒稳定性和性能

摘要

A method includes obtaining (902) a model (304) associated with a model-based controller (104, 306) in an industrial process (100, 302) having multiple actuator arrays (114, 116, 118, 120) and performing (914) temporal tuning of the controller. The temporal tuning includes adjusting one or more parameters of a multivariable filter (308) used to smooth reference trajectories of actuator profiles of the actuator arrays. The temporal tuning could also include obtaining (904) one or more uncertainty specifications for one or more temporal parameters of the model, obtaining (916) one or more overshoot limits for the actuator profiles, identifying (918) a minimum bound for profile trajectory tuning parameters, and identifying (920) one or more of the profile trajectory tuning parameters that minimize one or more measurement settling times without exceeding the one or more overshoot limits. The controller could be configured to use the adjusted parameter(s) during control of the industrial process such that the adjusting of the parameter(s) alters operation of the controller and the industrial process.
机译:一种方法包括在具有多个致动器阵列(114、116、118、120)的工业过程(100、302)中获得(902)与基于模型的控制器(104、306)相关联的模型(304)并执行(914) )控制器的时间调整。时间调整包括调整用于平滑致动器阵列的致动器轮廓的参考轨迹的多变量滤波器(308)的一个或多个参数。时间调整还可以包括获得(904)模型的一个或多个时间参数的一个或多个不确定性规范,获得(916)致动器轮廓的一个或多个过冲极限,识别(918)轮廓轨迹调整的最小界限。参数,并且识别(920)一个或多个轮廓轨迹调整参数,这些参数使一个或多个测量建立时间最小化而不会超过一个或多个过冲限制。控制器可以被配置为在工业过程的控制期间使用调整后的参数,使得参数的调整改变控制器和工业过程的操作。

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