ACOUSTIC PIEZOELECTRIC MEMBRANE TRANSDUCER ARRAYS WITH LOCALIZED MEMBRANE VIBRATIONS

摘要

An acoustic device (100) comprises an array of acoustic transducers (10a,10b) formed by a patterned stack (12-15) on a flexible substrate (11). The stack comprises a piezoelectric layer (13) sandwiched between respective bottom and top electrode layers (12,15), and a patterned insulation layer (14) formed by a pattern of insulation material (14m). The pattern comprises insulated areas (A14) where the insulation material (14m) is disposed between one of the electrodes (12,15) and the piezoelectric layer (13), and contact areas (A10) without the insulation material (14m) where both electrodes (12,15) contact the piezoelectric layer (13).