MEASUREMENT DEVICE HAVING OPTICAL MEASUREMENT UNIT AND METHOD FOR OPTICALLY MEASURING RANGE USING OPTICAL MEASUREMENT UNIT

摘要

To provide a measurement unit which is optically actuated in a non-contact manner and capable of performing correct measurement on a gear member at high speed.SOLUTION: In a measurement device 10, a measurement unit 17 is designed to emit a light beam LS coming from a light source LD along an optical axis OA in a direction of an object plane OE of a member 11, and guide optical components having different wavelengths λr, λg, λgr and λb which have been reflected on the object plane OE in a direction of an optical detector 26 via an optical unit 50. The optical unit 50 includes a device 51 at a first portion and a device 52 at a second portion, the device 51 at the first portion being reliably connected to the detector 26 by an optical waveguide 53, and the device 52 at the second portion being attachably/detachably placed on the device 51 at the first portion.SELECTED DRAWING: Figure 1A