FERROELECTRIC NANOPARTICLE ACCUMULATION METHOD, FERROELECTRIC NANOPARTICLE ACCUMULATION DEVICE, AND ELECTRONIC COMPONENT MANUFACTURING METHOD

摘要

To provide a method for accumulating ferroelectric nanoparticles, an accumulation device used therefor, and a method for manufacturing an electronic component.SOLUTION: A ferroelectric nanoparticle accumulation method is a method in which ferroelectric nanoparticles are dispersed in a dispersion medium, and a charged dispersion thereof is discharged toward a substrate charged to have a charge opposite to that of the dispersion, and the dispersion medium contained in an attached dispersion is removed while the dispersion is attached onto a surface of the substrate. The ferroelectric nanoparticles are ferroelectric tetragonal. Further, the dispersion is preferably discharged by electrostatic spraying. Electronic components can be manufactured by the ferroelectric nanoparticle accumulation method. A ferroelectric nanoparticle accumulation device includes a chamber, a nozzle for electrostatic spraying, a board for mounting the substrate placed at a position facing an opening of the nozzle for electrostatic spraying, and a heater for heating the board for mounting the substrate.SELECTED DRAWING: Figure 2