SMELL SENSOR AND METHOD FOR MANUFACTURING SMELL SENSOR

摘要

To provide a smell sensor which can detect a smell favorably and a method for manufacturing the smell sensor.SOLUTION: The smell sensor includes: an ion sensor formed by forming a sensing part 10 on a semiconductor substrate 100, the sensing part having a sensitive film 13 for changing a potential according to the state of a measurement target; a material adsorption film 3 arranged on the sensitive film 13, the material adsorption film changing the state more by adsorbing the smell material; and a reference electrode 4 for applying the reference voltage Vref to the material adsorption film 3. The reference electrode 4 is separated from the sensitive film 13 and does not overlap with the sensing unit 10 when viewed from the thickness direction D of the semiconductor substrate 100.SELECTED DRAWING: Figure 2