Flow control valve, flow control valve control device, flow control valve control method and flow control valve control program

摘要

PROBLEM TO BE SOLVED: To provide a flow rate control valve capable of feedforward control by using characteristic data uniformly prepared for each valve, a control device for the flow control valve, and a flow rate control even if the characteristics of the valves vary from product to product. The control method of the valve and the control program of the flow control valve are disclosed. The present invention is a flow control valve, which uses a valve installed in a fluid flow path, a flow meter for measuring the flow rate of the fluid flowing into the valve, and a valve using the measured values of the flow meter. It is equipped with a control unit to control, and the control unit is based on the characteristic data that defines the correlation between the differential pressure before and after the valve, the valve opening, and the flow rate, and the valve is based on the measured value of the flow meter and the actual opening of the valve. A valve that changes the actual opening of the valve to the valve opening that is estimated to be the set flow rate from the characteristic data in the differential pressure estimation process that estimates the front and rear differential pressure and the differential pressure that is estimated by the differential pressure estimation process. The opening change process is executed at least once. [Selection diagram] Fig. 5